Other Products

• Beam Shaper

  Converts a typical quasi-gaussian excimer laser beam profile into the preferable top-hat profile with uniform intensity at all points of the beam. Top-selling HY120 series beam shapers are available in a wide range of working distance and are unbeaten for >95% throughput efficiency.'

  

  Specification

  Input profile	Typical quasi-Gaussian
  Output profile	Top-hat to typically ±5%
  Operating Wavelength	Broadband (BB) version: 193-351 nm HY120/ Deep UV (DUV) sealed version: 157 nm)
  Output working distance	300, 450, 650, 800 and 1000 mm
  Output beam size	10 x 20 mm (typical) Note: Standard homogenised beam size is equal to X x Y mm where X and Y are the height and width of the input beam to its half-power points. Smaller or larger homogenised areas are easily obtained using a simple lens in conjunction with the HY120.
  Output beam uniformity	5 – 10% (typical)
  Maximum input beam size	45 x 45 mm overall 30 x 30 mm to half-power points (X x Y)
  Maximum input beam energy density	2 J/cm2
  Overall dimensions	110 x 110 x 40 mm
  Weight	1.0 kg
  Mounting	M6 post holder

  Ordering Information

  Model	Order Code	Working distance (mm)	Operating wavelength
  Two-axis	HY120	300, 450, 650, 800, 1000	BB or DUV
  Single-axis	HY110	300, 450, 650, 800, 1000	BB or DUV
  Spare optical elements (matched pair)	HY	300, 450, 650, 800, 1000	BB or DUV